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The physical fundamentals of thin film machining
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1974
Conference Paper
Titel
The physical fundamentals of thin film machining
Author(s)
Schiller, S.
Panzer, S.
Heisig, U.
Hauptwerk
Electron and ion beam science and technology 1974. Sixth International Conference
Konferenz
International Conference on Electron and Ion Beam Science and Technology 1974
Language
English
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Fraunhofer-Institut für Organische Elektronik, Elektronenstrahl- und Plasmatechnik FEP