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Potentials of the pulse magnetron sputter technology (PMST)
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1993
Conference Paper
Titel
Potentials of the pulse magnetron sputter technology (PMST)
Author(s)
Schiller, S.
Goedicke, K.
Kirchhoff, V.
Hauptwerk
Seventh International Conference on Vacuum Web Coating 1993. Proceedings
Konferenz
International Conference on Vacuum Web Coating 1993
Language
English
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Fraunhofer-Institut für Organische Elektronik, Elektronenstrahl- und Plasmatechnik FEP