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Thermal surface modification by electron beam high-speed scanning
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1988
Journal Article
Titel
Thermal surface modification by electron beam high-speed scanning
Author(s)
Schiller, S.
Panzer, S.
Zeitschrift
Annual review of materials science
Language
English
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Fraunhofer-Institut für Organische Elektronik, Elektronenstrahl- und Plasmatechnik FEP