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Localization length of integrated multi-walled carbon nanotubes

: Fiedler, H.; Hermann, S.; Rennau, M.; Schulz, S.E.; Gessner, T.

DOI: 10.1109/IITC.2014.6831852

	Institute of Electrical and Electronics Engineers -IEEE-: IEEE International Interconnect Technology Conference/Advanced Metallization Conference, IITC/AMC 2014 : San Jose, California, USA, 20 - 23 May 2014 Piscataway, NJ: IEEE, 2014 ISBN: 978-1-4799-5016-4 (Print) ISBN: 978-1-4799-5019-5 ISBN: 978-1-4799-5018-8 S.159-162
	International Interconnect Technology Conference (IITC) <17, 2014, San Jose/Calif.> Advanced Metallization Conference (AMC) <31, 2014, San Jose/Calif.>

	Englisch
	Konferenzbeitrag
	Fraunhofer ENAS ()

Abstract
We prepared CNT based vias on wafer scale. Based on the electrical characterization we extracted the localization length of the CNTs. While for short CNTs the classical transport regime is valid, the Anderson localization regime applies for longer CNTs. Supplementary the characteristic length scales were estimated based on the structure of the CNTs being in good agreement with the parameters extracted from the electrical measurements.

: http://publica.fraunhofer.de/dokumente/N-301812.html