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Localization length of integrated multi-walled carbon nanotubes

: Fiedler, H.; Hermann, S.; Rennau, M.; Schulz, S.E.; Gessner, T.


Institute of Electrical and Electronics Engineers -IEEE-:
IEEE International Interconnect Technology Conference/Advanced Metallization Conference, IITC/AMC 2014 : San Jose, California, USA, 20 - 23 May 2014
Piscataway, NJ: IEEE, 2014
ISBN: 978-1-4799-5016-4 (Print)
ISBN: 978-1-4799-5019-5
ISBN: 978-1-4799-5018-8
International Interconnect Technology Conference (IITC) <17, 2014, San Jose/Calif.>
Advanced Metallization Conference (AMC) <31, 2014, San Jose/Calif.>
Fraunhofer ENAS ()

We prepared CNT based vias on wafer scale. Based on the electrical characterization we extracted the localization length of the CNTs. While for short CNTs the classical transport regime is valid, the Anderson localization regime applies for longer CNTs. Supplementary the characteristic length scales were estimated based on the structure of the CNTs being in good agreement with the parameters extracted from the electrical measurements.