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Aspects and results of long-term stable deposition of Al2O3 with high-rate pulsed reactive magnetron sputtering
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1993
Conference Paper
Titel
Aspects and results of long-term stable deposition of Al2O3 with high-rate pulsed reactive magnetron sputtering
Author(s)
Frach, P.
Heisig, U.
Gottfried, C.
Walde, H.
Hauptwerk
Third International Conference on Plasma Surface Engineering 1992. Papers. Pt.1
Konferenz
International Conference on Plasma Surface Engineering 1992
DOI
10.1016/0257-8972(93)90079-4
Language
English
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Fraunhofer-Institut für Organische Elektronik, Elektronenstrahl- und Plasmatechnik FEP