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Aspects and results of long-term stable deposition of Al2O3 with high-rate pulsed reactive magnetron sputtering

 
: Frach, P.; Heisig, U.; Gottfried, C.; Walde, H.

:

Oechsner, H. ; European Joint Committee on Plasma and Ion Surface Engineering:
Third International Conference on Plasma Surface Engineering 1992. Papers. Pt.1
Lausanne: Elsevier Sequoia, 1993 (Surface and coatings technology 59.1993,Nr.1/3)
S.177-182
International Conference on Plasma Surface Engineering <3, 1992, Garmisch-Partenkirchen>
Englisch
Konferenzbeitrag, Zeitschriftenaufsatz
Fraunhofer FEP ()

: http://publica.fraunhofer.de/dokumente/N-30156.html