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Quasi-static microscanner with linearized scanning for an adaptive 3D laser camera

: Sandner, T.; Grasshoff, T.; Schwarzenberg, M.; Schroedter, R.; Schenk, H.


Piyawattanametha, W. (Ed.) ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
MOEMS and miniaturized systems XIII : 3 - 6 February 2014, San Francisco, California, United States
Bellingham, WA: SPIE, 2014 (Proceedings of SPIE 8977)
ISBN: 978-0-8194-9890-8
Paper 897717, 10 S.
Conference "MOEMS and Miniaturized Systems" <13, 2014, San Francisco/Calif.>
Fraunhofer IPMS ()

This paper presents a gimbaled MEMS scanning mirror (MSM) especially developed for adaptive raster scanning in a novel 3D ToF laser camera. Large quasi-static deflections of ±10° are provided by vertical comb drives in vertical direction in contrast to resonant horizontal scanning of the 2.6x3.6mm elliptical mirror at 1600 Hz and 80° optical scan range. For position feedback piezo-resistive position sensors are integrated on chip for both axes. To guarantee the full reception aperture of effective 5 mm a synchronized driven MEMS scanner array-consisting of five hybrid assembled MEMS devices-are used in a novel 3D ToF laser scanner enabling a distance measuring rate of 1MVoxel/s and an uncertainty of ToF distance measurement of 3...5 mm at 7.5 m measuring range for a gray target.