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Compact optical position feedback scheme for MOEMS mirrors

: Tortschanoff, A.; Baumgart, M.; Holzmann, D.; Lenzhofer, M.; Sandner, T.; Kenda, A.


Microsystem Technologies 20 (2014), Nr.4-5, S.743-749
ISSN: 0946-7076
Fraunhofer IPMS ()

Recently, we have realized a novel, very compact position sensing device for MOEMS mirrors, which is based on the measurement of a reflected light beam with a quadrant diode. This scheme is applicable to arbitrary trajectories and in this work we present the characteristics of this device, showing experimental results obtained with a test set-up, but also theoretical considerations and optical ray-tracing simulations.