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Advances in process control for E.B. evaporation of alloys
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1994
Conference Paper
Titel
Advances in process control for E.B. evaporation of alloys
Author(s)
Schiller, N.
Hauptwerk
8th International Conference on Vacuum Web Coating
Konferenz
International Conference on Vacuum Web Coating 1994
Language
English
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Fraunhofer-Institut für Organische Elektronik, Elektronenstrahl- und Plasmatechnik FEP