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Widely tunable grating-assisted heterogeneous silicon nitride/polymer waveguide coupler

: Zhang, Z.; Genrich, G.; Keil, N.; Grote, N.


Optics Letters 39 (2014), Nr.1, S.162-165
ISSN: 0146-9592
Fraunhofer HHI ()

A grating-assisted heterogeneous waveguide coupler is designed, fabricated, and demonstrated on a polymer platform. The parallel silicon nitrite core and polymer core are horizontally placed with vertical center alignment accuracy of +- 5 nm. The coupler is differentially thermally tunable. The temperature gradient distribution, introduced by offset micro-heaters, is studied by thermal simulations. A total tuning range of 82 nm is demonstrated experimentally.