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Resonant photoacoustic gas sensing with silicon tuning forks

: Kohring, M.; Willer, U.; Schade, W.


Optical Society of America -OSA-, Washington/D.C.:
CLEO: QELS Fundamental Science : 9.-14.6.2013, San Jose, CA, USA
Washington, DC: OSA, 2013 (OSA technical digest series)
ISBN: 978-1-55752-972-5
Paper CW3L.2
Conference on Lasers and Electro Optics (CLEO) <2013, San Jose/Calif.>
Quantum Electronics and Laser Science - Fundamental Science Conference (QELS) <2013, San Jose/Calif.>
Fraunhofer HHI ()

Silicon micro tuning forks are used as highly frequency selective sound detector for photoacoustic spectroscopy. The resonant properties and temperature dependencies of these sensors are investigated using the example of a fiber coupled methane sensor.