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Quasistatic microscanner with linearized scanning for an adaptive three-dimensional laser camera

: Sandner, T.; Grasshoff, T.; Schwarzenberg, M.; Schroedter, R.; Schenk, H.


Journal of micro/nanolithography, MEMS and MOEMS 13 (2014), Nr.1, Art. 011114
ISSN: 1537-1646
ISSN: 1932-5150
ISSN: 1932-5134
Fraunhofer IPMS ()

This paper reports on a gimbaled MEMS scanning mirror with quasistatic resonant actuation, specially developed for adaptive raster scanning in an innovative three-dimensional (3-D) time-of-flight (ToF) laser camera with real-time foveation. Large quasistatic deflections of 10 deg are provided by vertical comb drives in the vertical direction in contrast to resonant horizontal scanning. This mirror is 2.6 x 3.6 mm and operates at 1600 Hz with an 80-deg optical scan range. For position feedback, piezo-resistive position sensors are integrated on chip for both axes. To guarantee the full reception aperture of effectively 5 mm, a synchronized driven MEMS scanner array consisting of five hybrid assembled MEMS devices is used in an innovative 3-D ToF laser scanner. This enables a distance measuring rate of 1 MVoxel/s with an uncertainty in distance measurement of 3 to 5 mm for a 7.5-m measuring range for a gray target. Flatness-based open loop control is used for driving control of quasistatic axis in order to compensate for the dynamics of the low damped MEMS system.