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Translatory MOEMS actuator and system integration for miniaturized Fourier transform spectrometers

: Sandner, T.; Grasshoff, T.; Gaumont, E.; Schenk, H.; Kenda, A.


Journal of micro/nanolithography, MEMS and MOEMS 13 (2014), Nr.1, Art. 011115
ISSN: 1537-1646
ISSN: 1932-5150
ISSN: 1932-5134
Fraunhofer IPMS ()

A translatory MOEMS actuator with extraordinary large stroke especially developed for fast optical path length modulation in miniaturized Fourier transform infrared spectrometers (FTSs) is presented. A precise translational out-of-plane oscillation at 500 Hz with large stroke of up to 1.2 mm is realized by means of an optimized MEMS design using four pantograph suspensions of the comparative large mirror plate with 5-mm diameter. The MOEMS device is driven electrostatically resonant and is manufactured in a CMOS compatible silicon-on-insulator process. Up to +/- 600 mu m amplitude (typically 1 mm stroke) has been measured in vacuum of 30 Pa and 50 V driving voltage for an optimized pantograph design enabling reduced gas damping and higher driving efficiency. For FTS system integration, the MOEMS actuator has been encapsulated in a hybrid optical vacuum package. The thermal influences of packaging technology on MOEMS behavior are discussed in more detail.