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Reaktive sputtering in roll-to-roll coating machines using rotatable magnetrons

 
: Fahland, Matthias

International Council for Coatings on Glass e.V. -ICCG-:
ICCG 2014, 10th International Conference on Coatings on Glass and Plastics : Dresden, Germany, 22.-26. Juni 2014; Proceedings
Dresden, 2014
S.59-61
International Conference on Coatings on Glass and Plastics (ICCG) <10, 2014, Dresden>
Englisch
Konferenzbeitrag
Fraunhofer FEP ()
reactive sputtering; roll-to-roll coating; permeation barrier; aluminium oxide

: http://publica.fraunhofer.de/dokumente/N-298642.html