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2004
Journal Article
Titel
Singular points in electromechanical systems and their determination
Abstract
An approach to determine turning points in electromechanical systems is presented and applied to the determination of pull-in parameters. The pull-in phenomenon is an inherent instability in devices using electrostatic actuation where an electrostatic force works against an elastic restoring force. The paper presents a relation between multi-valued characteristics describing MEMS devices and weakly singular tracking problems. The technique of augmented systems that characterize turning points is applied to the analytical and numerical determination of pull-in parameters. The method is discussed using a computer algebra system and a VHDL-AMS simulation engine.