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Calibrating magnetic field sensor and method for manufacturing the same

: Stahl-Offergeld, Markus; Ernst, Roland; Hohe, Hans-Peter

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DE 102011004391 A: 20110218
Patent, Elektronische Publikation
Fraunhofer IIS ()

The magnetic field sensor (10) has a Hall sensor element (14) vertically arranged on a semiconductor substrate (12), and an excitation conduction arrangement is provided with an excitation conductor (16-1). The excitation conductor has a manufacturing process related tolerances and is arranged in an excitation conductor plane (E-1), spaced apart from the Hall sensor element. An independent claim is also included for a method for manufacturing magnetic field sensor.