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DEVICE, ARRANGEMENT, AND METHOD FOR THE INTERFERENCE STRUCTURING OF PLANAR SAMPLES

 
: Lasagni, Andrés-Fabián; Roch, Teja; Beyer, Eckhard

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Frontpage ()

DE 102011011734 A: 20110210
Deutsch
Patent, Elektronische Publikation
Fraunhofer IWS ()

Abstract
The invention relates to a device (and a corresponding method) for the interference structuring of a planar sample (P), comprising a laser (1), a focusing element (3, 3a, 3b), which is arranged in the beam path of the laser and by means of which the laser radiation can be focused in a first spatial direction (y), a first prism (4), in particular a biprism, which is arranged in the beam path of the laser and by means of which the laser radiation can be directed at a sample volume (5) in a second spatial direction (x) preferably perpendicular to the first spatial direction by means of two beams (2a, 2b), in such a way that the two beams interfere within the sample volume in an interference area (6), the sample volume, in which the planar sample is or can be placed in the interference area, and a moving unit (7), by means of which the beam(s); of the laser radiation can be moved in the first, the second, or the first and second spatial directions (x, y) and/or by means of which a/the sample can be moved in the sample volume in the first, the second, or the first and second spatial directions (x, y).

: http://publica.fraunhofer.de/dokumente/N-298087.html