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PIC-MC simulation of magnetron discharges

Ion energy distribution and 3D effects
: Pflug, A.

5th International Conference on Power Electronics for Plasma Engineering 2014. Conference Proceedings : Zielonka, Poland, May 20-22, 2014; [PE²]
Zielonka: TRUMPF Huettinger, 2014
ISBN: 978-83-930983-4-7
International Conference on Power Electronics for Plasma Engineering (PE2) <5, 2014, Zielonka>
Fraunhofer IST ()

Although magnetron sputtering has been established in the 80´s, the dynamics of magnetron discharge plasmas and subsequent reactive deposition processes are still not fully understood and involve surprising phenomena of collective many-particle dynamics. With a Particle-in-Cell Monte-Carlo (PIC-MC) simulation tool based on solving the Boltzmann equation with parallel algorithms, magnetron discharges can be analyzed in detail within 2D or 3D models. Thereby, 3D features such as non-symmetric anode effects or travelling plasma waves and their impact on the resulting ion energy distribution functions are revealed. The improved understanding of magnetron discharges obtained by PIC-MC plasma simulation helps to systematically improve the design of magnetron coaters in terms of homogeneity and stability.