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Synthesis and deposition of metal nanoparticles by gas condensation process

: Maicu, Marina; Schmittgens, Ralf; Hecker, Dominic; Glöß, Daniel; Frach, Peter; Gerlach, Gerald


Journal of vacuum science and technology A. Vacuum, surfaces and films 32 (2014), Nr.2, Art. 02B113, 9 S.
ISSN: 0734-2101
ISSN: 1520-8559
European Commission EC
FP7-Marie Curie Intra-European Fellowship Program;
European Commission EC
ERDF; 14256/2423
Fraunhofer FEP ()

In this work, the synthesis of Pt and Ag nanoparticles by means of the inert gas phase condensation of sputtered atomic vapor is presented. The process parameters (power, sputtering time, and gas flow) were varied in order to study the relationship between deposition conditions and properties of the nanoparticles such as their quantity, size, and size distribution. Moreover, the gas phase condensation process can be combined with a plasma enhanced chemical vapor deposition procedure in order to deposit nanocomposite coatings consisting of metallic nanoparticles embedded in a thin film matrix material. Selected examples of application of the generated nanoparticles and nanocomposites are discussed.