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Characterization of optical coatings using a multisource table-top scatterometer

: Finck, Alexander von; Herffurth, Tobias; Schröder, Sven; Duparré, Angela; Sinzinger, Stefan


Applied optics 53 (2014), Nr.4, S.A259-A269
ISSN: 0003-6935
ISSN: 1539-4522
ISSN: 1559-128X
Fraunhofer IOF ()
scattering measurements; surface measurements; thin films

Light scattering measurement and analysis is a powerful tool for the characterization of optical and nonoptical surfaces. To enable a more comprehensive postmeasurement characterization, three visible laser sources were recently implemented in a highly sensitive table-top scatterometer with 3D spherical detection capability. Based on wavelength scaling, the instrument is utilized to characterize thin-film coatings and their substrates with respect to surface roughness, roughness growth, and contamination. Topographic measurement techniques are used to verify the results. The spectral sensitivity to contamination (scatter loss) is demonstrated to be significantly different for single surfaces and interference coatings. In addition, power losses of a highly reflective coating are analyzed.