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Tunable external cavity quantum cascade lasers (EC-QCL): An application field for MOEMS based scanning gratings

: Grahmann, Jan; Merten, André; Ostendorf, Ralf; Fontenot, Michael; Bleh, Daniela; Schenk, Harald; Wagner, Hans-Joachim


Piyawattanametha, W. (Ed.) ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
MOEMS and miniaturized systems XIII : 3 - 6 February 2014, San Francisco, California, United States
Bellingham, WA: SPIE, 2014 (Proceedings of SPIE 8977)
ISBN: 978-0-8194-9890-8
Paper 897708
Conference "MOEMS and Miniaturized Systems" <13, 2014, San Francisco/Calif.>
Fraunhofer IPMS ()
Fraunhofer IAF ()
external cavity; scanning grating; QCL; tunable source; laser source; micro mirror

In situ process information in the chemical, pharmaceutical or food industry as well as emission monitoring, sensitive trace detection and biological sensing applications would increasingly rely on MIR-spectroscopic analysis in the 3 µm - 12 µm wavelength range. However, cost effective, portable, low power consuming and fast spectrometers with a wide tuning range are not available so far. To provide these MIR-spectrometer properties, the combination of quantum cascade lasers with a MOEMS scanning grating as wavelength selective element in the external cavity is addressed to provide a very compact and fast tunable laser source for spectroscopic analysis.