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Silicon nitride, silicon doxide thin insulating films, and other emerging dielectrics VIII

Proceedings of the International Symposium. Proceedings of the Symposium on Silicon Nitride, Silicon Dioxide Thin Insulating Films, and other Emerging Dielectrics to be held May 16 - 20, 2005 in Québec City as a part of the 207th meeting of the Electrochemical Society (ECS)
 
: Sah, R.E.; Deen, M.; Zhang, J.F.; Yota, J.; Kamakura, Y.

Pennington: Electrochemical Society, 2005, 587 S.
Electrochemical Society. Proceedings, 2005-01
International Symposium on Silicon Nitrid, Silicon Dioxide Thin Insulating Films, and other Emerging Dielectrics <8, 2005, Quebec>
Electrochemical Society (Meeting) <207, 2005, Québec>
ISBN: 1-566-77459-4
Englisch
Tagungsband
Fraunhofer IAF ()

: http://publica.fraunhofer.de/dokumente/N-29329.html