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Microsystem technology as a basis for integrated manufacturing

: Schlenker, Dirk

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trias Consult, Berlin:
Microsystems Technology in Germany 2014
Berlin: Trias Consult, 2014
ISSN: 2191-7183
Aufsatz in Buch, Elektronische Publikation
Fraunhofer IPA ()
Mikrosystemtechnik; microsystems; Microsystem Technology (MST); manufacturing; Mikrotechnik; Fertigung

Integrated manufacturing solutions require multi-functional and compact equipment and tools. Examples of this are the described miniaturized fluid systems for high-precision dosing of small quantities of liquid and the solution of an intelligent and process supporting workpiece carrier for active support in high-precision machining and assembly in manufacturing.