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Fabrication of customizable wedged multilayer Laue lenses by adding a stress layer

: Niese, Sven; Krüger, Peter; Kubec, Adam; Laas, Roman; Gawlitza, Peter; Melzer, Kathleen; Braun, Stefan; Zschech, Ehrenfried


Thin solid films 571 (2014), Nr.2, S.321–324
ISSN: 0040-6090
Fraunhofer IKTS ()
Fraunhofer IWS ()
diffractive optics; focused ion beam; multilayers; sputter deposition; stress layer; x-ray microscopy; x-ray optics

Diffractive optics for hard X-rays feature superior properties in terms of resolution and efficiency, if volume diffraction effects are exploited all-over the aperture. For multilayer Laue lenses, preferably a wedged geometry is required to obtain this effect. We present an approach utilizing an additional stress layer to realize the necessary geometrical modifications where each lens can be customized to a selected photon energy independently of the given multilayer deposition. The quality of the deposition of the stress layer is evaluated using a laboratory X-ray microscope prior to its application at synchrotron radiation facilities with a special approach to measure the relative layer tilt at high spatial resolution.