
Publica
Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten. Functional nano patterns realized by aligned nano imprint lithography
| Gessner, T.: Smart Systems Integration 2014 : Wien/Österreich, 26.3.2014 - 27.3.2014; 8th International Conference and Exhibition on Integration Issues of Miniaturized Systems - MEMS, NEMS, ICs and Electronic Components Aachen: Apprimus-Verlag, 2014 ISBN: 978-3-86359-201-1 S.443-446 |
| Smart Systems Integration Conference (SSI) <2014, Vienna> International Conference & Exhibition on Integration Issues of Miniaturized Systems - MEMS, NEMS, ICs and Electronic Components <8, 2014, Vienna> |
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| Englisch |
| Konferenzbeitrag |
| Fraunhofer ENAS () |