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Modeling of laser patterning of thin-film solar cells

: Peschel, Thomas; Matthäus, Gabor; Nolte, Stefan; Eberhardt, Ramona; Tünnermann, Andreas


Nakata, Y. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
Laser Applications in Microelectronic and Optoelectronic Manufacturing, LAMOM XIX : February 2014, San Francisco, California, United States
Bellingham, WA: SPIE, 2014 (Proceedings of SPIE 8967)
ISBN: 978-0-8194-9880-9
Paper 896714
Conference "Laser Applications in Microelectronic and Optoelectronic Manufacturing" (LAMOM) <19, 2014, San Francisco/Calif.>
Fraunhofer IOF ()
modelling; laser structuring; short pulses; thin-film solar cells

We report on theoretical models of the interaction of ultra-short laser pulses with multilayer structures used in thin-film solar cells. A finite-difference based optical model of light propagation within the thin-film system is used to determine the 3D-distribution of absorbed laser power in the structure. The model includes the evolution of the density of charge carriers which may be driven either by direct absorption of the laser radiation or multi-photon absorption and impact ionization of highly excited carriers. Depending on the excitation wavelength and pulse energy absorption occurs in different depths of the structure which has a large effect on the efficiency of the laser ablation process.