Publica
Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten. Multi-wafer Bonding, Stacking and Interconnecting of Integrated 3-D MEMS Micro Scanners
| Universiti Tunku Abdul Rahman -UTAR-, Kuala Lumpur:
ISMOT 2013. 14th International Symposium in Microwave and Optical Technology. Proceedings : Oct 28, 2013 - Oct 31, 2013, Kuala Lumpur
2013
S.30 |
| International Symposium on Microwave and Optical Technology (ISMOT) <14, 2013, Kuala Lumpur> |
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| Englisch |
| Konferenzbeitrag |
| Fraunhofer ENAS () |