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3D Integration for MEMS devices using photosenitive glass
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2011
Conference Paper
Titel
3D Integration for MEMS devices using photosenitive glass
Author(s)
Wünsch, Dirk
Hofmann, Christian
Besser, J.
Schubert, I.
Gottfried, Knut
Wiemer, Maik
Geßner, Thomas
Hauptwerk
Smart systems integration 2011. 5th European Conference & Exhibition on Integration Issues of Miniaturized Systems - MEMS, MOEMS, ICs and Electronic Components. CD-ROM
Konferenz
European Conference & Exhibition on Integration Issues of Miniaturized Systems - MEMS, MOEMS, ICs and Electronic Components 2007
Language
English
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Fraunhofer-Institut für Elektronische Nanosysteme ENAS