Publica
Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten. Plasma activated bonding of the heterogeneous material combinations LiTaO3/Si and poly-Si/SiO2
| Gessner, T. ; European Conference & Exhibition on Integration Issues of Miniaturized Systems - MEMS, MOEMS, ICs and Electronic Components; Fraunhofer Research Institution for Electronic Nano Systems ENAS:
Smart systems integration 2011. 5th European Conference & Exhibition on Integration Issues of Miniaturized Systems - MEMS, MOEMS, ICs and Electronic Components. CD-ROM : Dresden, Germany, 22 - 23 March 2011
Berlin: VDE-Verlag, 2011
ISBN: 978-3-8007-3324-8 |
| European Conference & Exhibition on Integration Issues of Miniaturized Systems - MEMS, MOEMS, ICs and Electronic Components <1, 2007, Paris> |
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| Englisch |
| Konferenzbeitrag |
| Fraunhofer ENAS () |