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Backside surface machining of silicon wafers using a nanosecond Tm:fiber MOPA system

 
: Shah, L.; El-Sherif, A.F.; Kadwani, P.K.; Gebhardt, M.; Gaida, C.; Bonhoff, T.

:

Optical Society of America -OSA-, Washington/D.C.:
CLEO: QELS Fundamental Science : 9.-14.6.2013, San Jose, CA, USA
Washington, DC: OSA, 2013 (OSA technical digest series)
ISBN: 978-1-55752-972-5
JTh2A.07
Conference on Lasers and Electro Optics (CLEO) <2013, San Jose/Calif.>
Quantum Electronics and Laser Science - Fundamental Science Conference (QELS) <2013, San Jose/Calif.>
Englisch
Konferenzbeitrag
Fraunhofer ILT ()

Abstract
We report on selective machining of the back surface machining of double-side polished silicon wafers, using a high peak power nanosecond Tm:fiber master oscillator power amplifier with a photonic crystal fiber based power amplifier.

: http://publica.fraunhofer.de/dokumente/N-275805.html