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Schichtsystem für eine transparente Elektrode und Verfahren zu dessen Herstellung

Layer system for manufacturing transparent electrode used in e.g. solar cell, has conductive oxide layer including surface structures with average height, which is larger is than average height of structures of base layer around factor
: Füchsel, Kevin; Schröder, Sven; Pulsack, Julian

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DE 102012105457 B3: 20120622
Patent, Elektronische Publikation
Fraunhofer IOF ()

The system has a structured base layer (2) applied on a substrate (1), and including structures (21) i.e. grids, which partially covers the substrate. A transparent conductive oxide layer (3) is applied on the base layer, and includes surface structures (31) with an average height, which is larger is than an average height of the structures of the base layer around a factor 3, preferably 5. The structures of the base layer include a periodical arrangement with a period of less than 1 micrometer. The average height of the structures of the base layer is less than 50 nanometers. The substrate is made of silicon, glass or glass ceramic. The base layer is a transparent dielectric layer. An independent claim is also included for a method for manufacturing a layer system for a transparent electrode.