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Digital photonic production of 3D micro fluidics in glass by high speed micro scanner

: Gottmann, J.

Volltext (PDF; )

MATEC web of conferences 8 (2013), Art.05003, 2 S.
ISSN: 2261-236X
Topical Meeting "Progress in Ultrafast Laser Modifications of Materials" <1, 2013, Cargèse>
Konferenzbeitrag, Zeitschriftenaufsatz, Elektronische Publikation
Fraunhofer ILT ()

Digital photonic production of 3D microfluidic devices and assembled micro mechanicsinside fused silica glass is carried out using In-volume Selective Laser-induced Etching (ISLE).From CAD data of digital 3D objects the trajectories of the laser focus are automatically generated. The CAM software has been developed controlling different fs- and ps-lasers, the beam deflection systems and the translation stages to produce the structures automatically.