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Quasi-static microscanner with linearized scanning for an adaptive 3D-laser camera

: Sandner, Thilo; Grasshoff, Thomas; Schwarzenberg, Markus; Schenk, Harald

Volltext urn:nbn:de:0011-n-2706385 (534 KByte PDF)
MD5 Fingerprint: e01bfc17fb3eb7118dc63039a11c4819
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Erstellt am: 13.12.2013

Institute of Electrical and Electronics Engineers -IEEE-; IEEE Photonics Society:
International Conference on Optical MEMS and Nanophotonics Conference, OMN 2013. Proceedings : 18-22 August 2013, Kanazawa, Japan
Piscataway, NJ: IEEE, 2013
ISBN: 978-1-4799-1512-5
International Conference on Optical MEMS and Nanophotonics (OMN) <2013, Kanazawa>
European Commission EC
FP7-ICT; 248623; TACO
Konferenzbeitrag, Elektronische Publikation
Fraunhofer IPMS ()

This paper presents a gimbaled MEMS scanning mirror especially developed for adaptive raster scanning in a novel 3D-ToF laser camera. Substantial quasi-static deflections of ±10° are provided by vertical comb drives in vertical direction in contrast to resonant horizontal scanning of the 2.6×3.6mm elliptical mirror at 1600Hz and 80° FOV. To guarantee the full reception aperture of effective 5mm a synchronized driven array - consisting of five hybrid assembled MEMS devices with integrated position feedback - is used by the 3D camera enabling a distance measuring rate of 1MVoxel/s and an uncertainty of ToF distance measurement of 5mm at 7.5m.