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Micro-scanning mirrors for high-power laser applications in laser surgery

: Sandner, T.; Kimme, S.; Grasshoff, T.; Todt, U.; Graf, A.; Tulea, C.; Lenenbach, A.; Schenk, H.


Institute of Electrical and Electronics Engineers -IEEE-; IEEE Photonics Society:
International Conference on Optical MEMS and Nanophotonics Conference, OMN 2013. Proceedings : 18-22 August 2013, Kanazawa, Japan
Piscataway, NJ: IEEE, 2013
ISBN: 978-1-4799-1512-5
International Conference on Optical MEMS and Nanophotonics (OMN) <2013, Kanazawa>
European Commission EC
FP7-ICT; 248623; TACO
Fraunhofer IPMS ()
Fraunhofer ILT ()

We present two novel micro scanning mirrors with large aperture and HR dielectric coatings suitable for high power laser applications in a miniaturized laser instrument. An electrostatic driven 2D-raster scanning mirror with 5×7.1mm aperture is used for dynamic steering of the ps-laser beam of the laser cutting process. A second magnetic 2D-beam steering mirror enables a static beam correction of a hand guided laser instrument. Optimizations of a magnetic gimbal micromirror with 6 mm × 8 mm mirror plate are presented; here static deflections of 3° were reached. Both MEMS devices were successfully tested with a high power ps-laser at 532nm up to 20W CW.