Options
2000
Conference Paper
Titel
From Modular MEMS to a Modular Microfactory - the Hybrid Microfactory?
Alternative
Von modularen Mikrosystemen zur modularen miniaturisierten Fertigung - Die modulare Mikrofabrik
Abstract
Many industrial branches may benefit from MEMS technology. Most of them require custom-designed MEMS in mid-scale volumes, which are at present not available at market-acceptable costs. A modular MEMS packaging and interface concept, which includes electric, fluidic, optic, mechanical, thermal and communication interfaces, contributes to less costly solutions with faster time to market. On its foundation, a modular microfactory framework based on a unit construction system is proposed.
Language
English