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2003
Conference Paper
Titel
Pressure detection with a resonance method
Abstract
A new principle for pressure measurements is presented. It bases on the shifting of the resonance frequency of a diaphragm by mech. stress e.g. pressure. The diaphragm structure can be made easily by LTCC technol. A piezoelec. layer which is screen-printed works as sensor and actuator. The paper describes aspects of the material development, construction and characterization of the pressure sensor. Further on an electronic circuit for detection of the resonance frequency is presented.