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Micromachined thermoelectric test device based on silicon/germanium superlattices: Simulation, preparation and characterization of thermoelectric behavior

 
: Schumann, J.; Kleint, C.A.; Vinzelberg, H.; Thomas, J.; Hecker, M.; Nurnus, J.; Boettner, H.; Lambrecht, A.; Künzel, C.; Völklein, F.

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International Thermoelectric Society -ITS-:
ICT '03, XXII International Conference on Thermoelectrics. Proceedings : August 17 - 21, 2003, Palais des Congrès, La Grande Motte, France
Piscataway, NJ: IEEE Order Department, 2003
ISBN: 0-7803-8301-X
S.677-681
International Conference on Thermoelectrics (ICT) <22, 2003, La Grande-Motte>
Englisch
Konferenzbeitrag
Fraunhofer IPM ()

Abstract
Strain-symmetrized superlattice structures based on epitaxially grown Si/Ge multilayers are expected to be promising systems for efficient thermoelectric micro-systems. The paper presents the development of a membrane-type sensor device consisting of Si/Ge superlattice and Si(sub x)Ge(sub 1-x)-alloy legs allowing the study of the thermoelectric behavior at minimized influence of the supporting substrate components. By means of numerical simulation the optimum layout parameters were determined as well as the temperature distribution within the device including the sensitivity to be expected were estimated. Black body radiation measurements of the functional parameters on nearly freestanding thermopile arrays in the sensor regime are presented.

: http://publica.fraunhofer.de/dokumente/N-26616.html