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Integration of optical interconnects and optoelectronic elements on wafer-scale

: Dannberg, P.; Erdmann, L.; Krehl, A.; Wächter, C.; Bräuer, A.


Materials Science in Semiconductor Processing 3 (2000), Nr.5-6, S.437-441
ISSN: 1369-8001
Fraunhofer IOF ()
optical interconnection; waveguide; polymer; replication

The uv-reaction molding technology enabling for the fabrication of microoptical elements with rectangular, triangular or circular cross-sections (waveguides, prisms, lenses) in optical polymers is described. Multimode waveguide optical interconnects, coupling prisms and holding structures for fibers can be fabricated in one step. A three-dimensional monomode waveguide interconnection module is presented. Stability tests of the microoptical elements are reported.