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Optical position feedback of quasi-static 2D MOEMS mirrors

: Tortschanoff, A.; Baumgart, M.; Holzmann, D.; Lenzhofer, M.; Sandner, T.; Kenda, A.


Schmid, U. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
Smart sensors, actuators and MEMS VI. Vol.1 : 24 - 26 April 2013, Grenoble, France
Bellingham, WA: SPIE, 2013 (Proceedings of SPIE 8763)
ISBN: 978-0-8194-9560-0
Paper 87630J
Conference "Smart Sensors, Actuators and MEMS" <6, 2013, Grenoble>
Fraunhofer IPMS ()

Recently, we have realized a new position sensing device for MOEMS mirrors applicable to arbitrary trajectories, which is based on the measurement of a reflected light beam with a quadrant diode. In this work we present the characteristics of this device, showing first experimental results obtained with a test set-up, but also theoretical considerations and optical ray-tracing simulations.