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AMC: An emerging class of contamination

: Keller, M.

Cleanroom technology 20 (2012), Nr.10, S.22-24
ISSN: 1365-5531
Fraunhofer IPA ()
Airborne contamination; Airborne Molecular Contamination (AMC); VOC Emission; Volatile Organic Compounds (VOC); cleanroom suitable materials (CSM); VDI 2083 Blatt 17; ISO 14644; ISO 14644-1; ISO 14644-8; Klassifizierung; Reinraum; Emission; Fertigung; Kontamination

Measurement methods for airborne molecular contamination (AMC) and design considerations for AMC-reduced cleanrooms are discussed. The guideline ISO 14644-8 defines the classification of cleanrooms in terms of the pollution caused by AMC. The classes are specified by the decadic logarithm of concentration in gram per cubic meter for each defined group of contaminants, for the contaminant group of volatile organic compounds. The location of a cleanroom needs to be considered during the early conception stage. Attention needs to be drawn to components such as building materials, clothing, packaging materials, equipment and its components, and media for cleaning. The ISO-AMC classification of cleanrooms according to ISO 14644-8 requires the determination of all the compounds and compound classes that will be measured.