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Deposition of PZT on copper-coated polymer films

: Suchaneck, G.; Volkonskiy, O.; Gerlach, G.; Hubika, Z.; Dejneka, A.; Jastrabik, L.; Günther, S.; Schultheiss, E.

Bucko, M.M. ; European Ceramic Society:
11th international conference of the European Ceramic Society 2009. Proceedings. CD-ROM : Krakow, 21 - 25 June 2009
ISBN: 978-83-609-5854-4
European Ceramic Society (ECERS International Conference and Exhibition) <11, 2009, Krakow>
Fraunhofer FEP ()

In this work we analyze the deposition process of (111)-textured Pb(Zr,Ti)O3 (PZT) thin perovskite films directly on copper-coated polymer films. Cu thin films with a thickness of about 200 nm were deposited by DC sputtering in a reel-to-reel processing system onto Kapton® HN films with a thickness of 25 m comprising an in-situ reactively sputtered dielectric TiO2-x adhesion layer. PZT thin films with a thickness of 200 to 400 nm were deposited using a pulsemodulated RF plasma jet system consisting of a hollow cathode for reactive sputtering.