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2007
Conference Paper
Titel
Transmission line pulsing behavior of thin film resistors
Abstract
One of the most important issues of resistor properties is the value stability under different electrical and non electrical influences. Mechanical or thermal stress together with the electrical one represents the main factors that have a major contribution in resistor value stability. With shrinking resistor geometries of discrete, integrated and integral passives, the electrical stress gains more and more importance, especially under short duration voltage pulses. The analytical test technique of Transmission Line Pulsing (TLP) allows, on the basis of square pulses, the in-situ monitoring of the voltages and currents at the DUT and helps to gain fundamental insights into the electrical behavior. The resistance change due to an applied high voltage pulse is a measure of the electrostatic discharge susceptibility of thin film resistors. The influence of the pulse width (1.5 ns, 10 ns, 100 ns and300 ns) and amplitude on the susceptibility was investigated on thin film re sistors. By means of the Transmission Line Pulsing technique (TLP), the ESD behavior of thin film resistors is presented.