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Piezoresitive diamond-like carbon micro strain gauges

 
: Peiner, E.; Tibrewala, A.; Lüthje, H.; Bandorf, R.; Biehl, S.; Doering, L.

18th IMEKO World Congress 2006: Metrology for a Sustainable Development. Vol.2
Red Hook, NY: Curran, 2006
ISBN: 978-1-62276-646-8
S.1651-1656
IMEKO World Congress <18, 2006, Rio de Janeiro>
Englisch
Konferenzbeitrag
Fraunhofer IST ()

Abstract
Hydrogenated (a-C:H) and hydrogen-free (a-C) amorphous diamond-like carbon (DLC) strain gauges have been successfully integrated on micromachined silicon bossmembrane force sensors. DLC strain gauges were investigated under vertical and horizontal connection as well as longitudinal and transversal orientation at temperatures between RT and 60C revealing piezoresistive gauge factors typically in the range of 50-90 (a-C:H) and 20-30 (a-C).

: http://publica.fraunhofer.de/dokumente/N-263106.html