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Preface to the special issue on the EMRS 2004 Symposium B on "Material Science Issues in Advanced CMOS Source-drain Engineering"

Vorwort zu der Sonderausgabe über das EMRS 2004 Sympsium B zu "Materialwissenschaftliche Fragestellungen zu fortschrittlichen Technologien von Source/Drain-Gebieten in CMOS Transistoren"
 
: Mannino, G.; Feudel, T.; Pichler, P.; Servidori, M.

:

Mannino, G.:
EMRS 2004, Symposium B, Material Science Issues in Advanced CMOS Source-Drain Engineering
Amsterdam: Elsevier, 2004 (Materials Science and Engineering. B 114/115)
ISSN: 0921-5107
S.1-2
European Materials Research Society (Spring Meeting) <2004, Strasbourg>
Symposium B "Material Science Issues in Advanced CMOS Source-Drain Engineering" <2004, Strasbourg>
Englisch
Konferenzbeitrag
Fraunhofer IISB ()
CMOS; silicon

Abstract
The text is a preface to a special issue of Materials Science and Engineering B containing selected papers presented at symposium B "Material science issues in advanced CMOS source-drain engineering" of the E-MRS Spring Meeting held in Stra sbourg from May 24 to 28, 2004.

: http://publica.fraunhofer.de/dokumente/N-25787.html