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Micro- and nano-NDE in the laboratory for acoustic diagnosis and quality assurance EADQ Dresden

: Köhler, B.; Schreiber, J.; Bendjus, B.; Herms, M.; Melov, V.; Helfen, L.; Mikulik, P.; Baumbach, T.

Meyendorf, N. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
Testing, reliability, and application of micro- and nano-material systems II : 15 - 17 March 2004, San Diego, California, USA
Bellingham/Wash.: SPIE, 2004 (SPIE Proceedings Series 5392)
ISBN: 0-8194-5309-9
Conference "Testing, Reliability, and Application of Micro- and Nano-Material Systems" <2004, San Diego/Calif.>
Fraunhofer IZFP, Institutsteil Dresden ( IKTS-MD) ()
NDE; x-ray; micro mirror; SEM; SEAM; SPM; vibrometer

NDE activities at the Laboratory for Acoustic Diagnosis and Quality Assurance (EADQ) Dresden are outlined. The applied methods comprise acoustic, thermal, optical, and X-ray ones. Additionally, scanning probe methods (SPM) and scanning electron microscopy (SEM) are used. Combinations of different methods are especially effective. This is demonstrated for the coupling of an acoustic approach with SEM. For NDE on a micro- and nano-meter scale, preparation of appropriate test flaws and the verification of the NDE results turn out to be a challenge. To meet this challenge, we propose an approach based on focused ion beam technique.