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Improved mechanical properties of metallic micro-structures

: Schreiber, J.; Braun, S.; Gatto, A.; Schenk, H.


Meyendorf, N. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
Testing, reliability, and application of micro- and nano-material systems II : 15 - 17 March 2004, San Diego, California, USA
Bellingham/Wash.: SPIE, 2004 (SPIE Proceedings Series 5392)
ISBN: 0-8194-5309-9
Conference "Testing, Reliability, and Application of Micro- and Nano-Material Systems" <2004, San Diego/Calif.>
Fraunhofer IZFP, Institutsteil Dresden ( IKTS-MD) ()
Fraunhofer IWS ()
Fraunhofer IOF ()
Fraunhofer IPMS ()
roughness; texture; residual stress; nano-crystalline; structure relaxation; bending test

Properties of materials used in micro- and nano-technology are rather different from those of bulk material and even to lateral macroscopic extended thin films. Designing MOEMs components, it has to be clarified how functionality and reliability of the micro-devices are influenced. Suitable tools are necessary to test the materials properties on micro- and submicro-scale. The application of Al- and Ti-layers in micro-mirror devices is discussed. Attempts to control and improve their mechanical properties in accordance with the application requirements for micro-mirror devices are described.