Publica
Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten. Advanced Methods for surface and subsurface defect characterization of optical components
| Al-Jumaily, G.A.; Duparre, A.; Singh, B. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries
Bellingham/Wash.: SPIE, 2000 (SPIE Proceedings Series 4099)
ISBN: 0-8194-3744-1
S.290-298 |
| Conference "Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries" <2000, San Diego/Calif.> |
|
| Englisch |
| Konferenzbeitrag |
| Fraunhofer IOF () |
| surface roughness; subsurface damage; light scattering; scanning force microscopy; surface quality |
Abstract
We discuss principles of optical surface quality assessment. The micro topography of well polished fused silica, CaF2 and Si surfaces was examined locally and by covering large sample areas. Power Spectral Densities (PSD) were used for consistent roughness description. Subsurface damage was detected by a modified white light interferometer technique and total scattering measurement.