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The injection moulding of fine structurized optical surfaces

: Hommel, B.; Kießling, H.; Müller, W.

Verband der Elektrotechnik, Elektronik, Informationstechnik -VDE-:
MICRO.tec 2000. VDE World Microtechnologies Congress: Applications - Trends - Visions. Proceedings. Vol.1 : VDE World Microtechnologies Congress, September 25 - 27, 2000, Expo 2000, Hannover, Germany
Berlin: VDE-Verlag, 2000
ISBN: 3-8007-2579-7
World Microtechnologies Congress (MICROTEC) <2000, Hannover>
Fraunhofer IOF ()

An important prerequisite for the large-scale industrial use of new microsystems with micromechanical, microelec-tronical and microoptical components is the possibility of low - cost production of these systems in large numbers. Replication techniques such as injection moulding offer this opportunity. In this poster we describe the process of design, original fabrication and replication of aberration - corrected holographic convave gratings by injection moulding techniques and discuss the fidelity of the process.