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Seebeck ozone sensors

: Mischo, M.; Bitterling, M.; Himmerlich, M.; Krischok, S.; Ambacher, O.; Cimalla, V.


Institute of Electrical and Electronics Engineers -IEEE-:
Transducers 2013, 17th International Conference on Solid-State Sensors, Actuators and Microsystems : Eurosensors XXVII; Barcelona, Catalonia (Spain); 16 - 20 June 2013
Piscataway, NJ: IEEE, 2013
ISBN: 978-1-4673-5981-8
ISBN: 978-1-4673-5983-2
International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) <17, 2013, Barcelona>
European Conference on Solid-State Transducers (Eurosensors) <27, 2013, Barcelona>
Fraunhofer IAF ()
gas sensor; indium oxide; thermoelectricity; ozone

A direct Seebeck ozone gas sensor is presented based on thin nanocrystalline InOx films. In this type of sensors, the Seebeck voltage is directly altered by chemisorbed gas. InO(x) films with intrinsic electron accumulation at the grain boundaries and surfaces enable the design of sensors at low temperatures. Additionally, ultraviolet illumination can be used to improve the response time. A packaged sensor system was realized, which is able to detect ozone concentrations as low as 10 ppb and is, thus, suitable for environmental monitoring.