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Resonant biaxial 7-mm MEMSm mirror for omnidirectional scanning

 
: Hoffmann, U.; Aikio, M.; Janes, J.; Senger, F.; Stenchly, V.; Weiss, M.; Quenzer, H.-J.; Wagner, B.; Benecke, W.

:

Piyawattanametha, W. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
MOEMS and Miniaturized Systems XII : 2.-7.2.2013, San Francisco, CA, USA
Bellingham, WA: SPIE, 2013 (Proceedings of SPIE 8616)
ISBN: 978-0-8194-9385-9
Paper 86160C
Conference "MOEMS and Miniaturized Systems" <12, 2013, San Francisco/Calif.>
Englisch
Konferenzbeitrag
Fraunhofer ISIT ()

Abstract
Low-cost automotive laser scanners for environment perception are needed to enable the integration of advanced driver assistant systems (ADAS) into all automotive vehicle segments, a key to reducing the number of traffic accidents on roads. An omnidirectional 360 degree laser scanning concept has been developed based on combination of an omnidirectional lens and a biaxial large aperture MEMS mirror. This omnidirectional scanning concept is the core of a small sized low-cost time-of-flight based range sensor development. This paper describes concept, design, fabrication and first measurement results of a resonant biaxial 7mm gimbal-less MEMS mirror that is electrostatically actuated by stacked vertical comb drives. Identical frequencies of the two resonant axes are necessary to enable the required circle scanning capability. A tripod suspension was chosen since it allows minimizing the frequency splitting of the two resonant axes. Low mirror curvature is achieved by a th ickness of the mirror of more than 500 µm. Hermetic wafer level vacuum packaging of such large mirrors based on multiple wafer bonding has been developed to enable to achieve a large mechanical tilt angle of +/- 6.5 degrees in each axis. The 7mm-MEMS mirror demonstrates large angle circular scanning at 1.5kHz.

: http://publica.fraunhofer.de/dokumente/N-254758.html