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Evidence of the lateral collection significance in small CMOS photodiodes

: Blanco-Filgueira, B.; Lopez, P.; Doge, J.; Suarez, M.; Roldan, J.B.


IEEE Circuits and Systems Society:
IEEE International Symposium on Circuits and Systems, ISCAS 2012 : Seoul, South Korea, 20 - 23 May 2012
Piscataway: IEEE, 2012
ISBN: 978-1-4673-0219-7 (electronic)
ISBN: 978-1-4673-0218-0
S.3098-3101 (Vol.4)
International Symposium on Circuits and Systems (ISCAS) <2012, Seoul>
Fraunhofer IIS ()

The lateral collection capacity of small CMOS photodiodes, scanned with a point source illumination, is studied. The mathematical solution of the physical equations is compared to experimental measurements in a standard UMC 90nm technology. They show close agreement and reveal that the lateral collection through the sidewalls of the depletion region becomes a significant component of the overall photocurrent. The same conclusion is achieved through device simulations under uniform illumination using ATLAS.